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Seminar 6: Thin Film Deposition Fundamentals

  • CUNY ASRC Auditorium 85 Saint Nicholas Terrace New York, NY, 10027 United States (map)

The ASRC NanoFabrication Facility and Futureworks NYC, in collaboration with the Kurt J. Lesker Company, are offering a free technical workshop on vacuum deposition techniques. J.R. Gaines, Technical Director of Education for the Kurt J. Lesker Company, will introduce attendees to fundamental concepts and operating principles for the deposition of thin films by thermal and e-beam evaporation as well as sputtering by DC and RF techniques. The workshop is designed for both new and experienced users.

The course includes a recap of basic vacuum technology, followed by fundamental design and operational aspects of each thin film deposition technique as it impacts thin film properties. Issues such as deposition rate, film uniformity, morphology and density are discussed. Several growth models are presented with reference to how specific materials properties and deposition conditions may affect thin film morphology. Attendees will receive a personalized certificate of attendance signed by the course instructor.